Board of Directors

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Kenneth Kannappan

Chairman of the Board – Mattson Technology
President & CEO, Plantronics, Inc.

Member of the Audit Committee
Member of the Compensation Committee

David Dutton

President and Chief Executive Officer, Mattson Technology

Dr. Hans-Georg Betz

President and CEO, Advanced Energy

Member of the Nominating and Governance Committee
Chair of the Compensation Committee

Dr. Jochen Melchior

Former CEO, STEAG AG

Kenneth Smith

Retired President, WaferTech

Member of the Audit Committee
Member of the Compensation Committee

Shigeru Nakayama

Senior Advisor
SEMI/SSIS

Chair of the Nominating and Governance Committee

John C. Bolger

Former CFO, Cisco Systems

Chair of the Audit Committee
Member of the Nominating and Governance Committee