Board of Directors

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Kenneth Kannappan

Chairman of the Board – Mattson Technology
President & CEO, Plantronics, Inc.

Member of the Audit Committee
Member of the Compensation Committee

David Dutton

President and Chief Executive Officer, Mattson Technology

Dr. Hans-Georg Betz

Former President and CEO, Advanced Energy

Member of the Nominating and Governance Committee

Kenneth Smith

Retired President, WaferTech

Member of the Audit Committee
Chair of the Compensation Committee

Shigeru Nakayama

Senior Advisor
SEMI/SSIS

Chair of the Nominating and Governance Committee

Scott D. Peterson

Retired Managing Partner, Ernst & Young

Chair of the Audit Committee
Member of the Nominating and Governance Committee

Richard Dyck

Founder & President of TGK K. K. and TCJ K.K.

Member of the Nominating and Governance Committee
Member of the Compensation Committee

Scott Kramer