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Mattson Technology Expands Etch Position of paradigmE Etch System for Advanced Foundry Production

FREMONT, CA -- (MARKET WIRE) -- 02/14/12 -- Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced semiconductor processing equipment, today announced that a leading semiconductor manufacturer has accepted its paradigmE etch system for the production of advanced logic chips.

"The acceptance of the paradigmE by this leading semiconductor manufacturer underscores the growing customer confidence in the system's technology extendibility and processing performance on advanced etch applications," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group (PPG). "This is our initial etch win in the foundry/logic area, and we are expanding our position in this critical market. The paradigmE continues to deliver the on-wafer results, process versatility and increased productivity our customers require to manufacture the devices that fuel the mobility era. The paradigmE is now fully diversified in DRAM, NAND and foundry/logic, which should enable Mattson Technology to achieve and maintain improved financial performance through the cyclicality of the semiconductor equipment business."

About Mattson Technology, Inc.
Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. All statements other than statements of historical fact are statements that could be deemed forward-looking statements, including but not limited to statements of the plans, strategies and objectives of management for future operations. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially from those expressed or implied by such forward-looking statements and assumptions. Such risks and uncertainties include, but are not limited to: macroeconomic and geopolitical trends and events; end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact

Lauren Vu

Mattson Technology, Inc.

tel +1-510-492-6250

fax +1-510-492-5914

lauren.vu@mattson.com



Investor Contact

Laura Guerrant-Oiye

Guerrant Associates

tel +1-808-882-1467

lguerrant@guerrantir.com

Source: Mattson Technology, Inc.

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